Effect analysis of two discharge modes on parameters in micro-gap electrostatic discharge

There exist two discharge modes in real electrostatic discharge(ESD) events and in experiment with ESD generator. ESD with electrode moving velocity were regarded as air discharge in many previous literatures. Contact mode electrostatic discharge is an important factor in ESD events with electrode moving to the target and need to be considered because electrode finally collides with the target. Discharge results were measured in ESD experiment with ESD generator, and analysis is given for impact of two modes of air discharge and contact discharge on the whole ESD process. Mutual action of two modes of air discharge and contact discharge result in consequences of ESD with electrode moving to the target.