Air dynamics analysis on electrode moving speed effect

The formation mechanism of partial vacuum due to electrode moving speed to the target in electrostatic discharge(ESD) process is explained based on the principle of air dynamics. Combining with double process mini-gap ESD model, the mechanism of gas pressure variation effect on parameters in ESD is discussed, and the influence of electrode moving speed on the discharge parameters is analyzed. Processing of large amount of data and simulation were performed based on experiment with our newly invented ESD measurement system, to search relationship of discharge parameters relying on electrode moving speed. Electrode moving speed, as a result, has strong positive correlation with current peak and current rise slope, but has strong negative correlation with current fall slope. The consequence of the work may provide benefit reference on proposal to non-contacted ESD test standard.